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Batch type sputtering equipment - List of Manufacturers, Suppliers, Companies and Products

Batch type sputtering equipment Product List

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Standard Batch Type Sputtering Device (SRV Series)

Standard Batch Type Sputtering Device (SRV Series)

Multi-functional, compact, flexible support, a standard lineup with proven results and trust.

A standard batch-type sputtering series that incorporates a three-element cathode into a compact housing. It covers the film deposition process for various electronic devices and related materials from basic development to mass production, thanks to a wide uniform range of film thickness distribution and an automatic control mechanism. Our film deposition processes and options, supported by numerous delivery records, will reliably meet your requirements.

  • Sputtering Equipment
  • Plasma surface treatment equipment

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Mass production compatible batch-type sputtering system (Model STH10311)

Mass production compatible batch-type sputtering system (Model STH10311)

A batch-type sputtering device equipped with four substrate holders for φ410 substrates, achieving excellent film thickness uniformity within ±5% in the same substrate holder.

This is a batch-type sputtering device that achieves both processing capacity for mass production and excellent film thickness uniformity by adopting multiple self-rotation substrate stages. Despite being a chamber system exceeding 1 meter due to the side sputtering method, it enables easy attachment and detachment of substrates and targets, as well as simplified maintenance within the vacuum chamber. It incorporates essential considerations for mass production equipment, such as a data logging system optimal for mass production and control interface software that facilitates device control and management. It balances quality and throughput for large substrates represented by 300 mm wafers, as well as for the mass production of small electronic components like resistors and sensors.

  • Sputtering Equipment

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Batch Type Sputtering System

Batch Type Sputtering System

A method of production that mounts a substrate in a single chamber.

The Batch Type Sputtering System is a method that mounts substrates in a single chamber, allowing for significant cost reductions.

  • Sputtering Equipment
  • Coater
  • Stepper

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